SONY LASERSCALE
SONY LASERSCALE BS77
High accuracy, compact design
With easy operation
Little affected by changes in humidity/atmospheric pressure and air flow
Non-contact head achieving high repeatability and extremely small return error Applications
Applications
Electron microscopes, wafer checkers, etc.
SONY LASERSCALE BS75A-R/RS
High accuracy laser scales capable of high resolution (0.05µm/0.1µm), high-stability, ultra high-precision measuring. Exposed type with a built-in optical zero point, featuring a low expansion coefficient.
Comparable to the laser interferometer in accuracy and resolution.
Has a built-in high accuracy optical zero point.
Various measuring lengths ranging from 30 to 410mm 9 models.
Easy to install and adjust like Magnescaler
Little affected by disturbed air and changing temperature and atmospheric pressure
Various interface modes
Applications
semiconductor manufacture, inspection, precision machining and testing.
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